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Scanning Electron Microscopy

JEOL JSM6360LAThe electron microscope unit at PELM is equiped with a top of the range JEOL JSM6360LA. The energy dispersive X-rays spectrometer (EDS) is integrated to the SEM.

Scanning Electron Microscopy (SEM) produces images by scanning an electron beam across the surface of a sample. An image is reconstructed from the signals generated when the beam strikes the surface. The most widely used signals are secondary electrons (SE), backscattered electrons (BSE) and, characteristic x-rays (analysed with EDS).

The PELM facilities include a specimen preparation area, a gold sputter coater and optical microscopes.

The SEM provides information related to:

  • Topographical features
  • Morphology
  • Phase distribution
  • Compositional differences
  • Crystal structure
  • Crystal orientation
  • Presence and location of electrical defects

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